Which types of sputtering targets need elastomer bonding?

The following three types of sputtering targets are require elastomer bonding:

Pure metal sputtering targets: Indium (In) sputtering target, Bismuth (Bi) sputtering target, Lithium (Li) sputtering target, Manganese (Mn) sputtering target, Selenium (Se) sputtering target,…..
Oxide sputtering targets: Cobalt Oxide (CoO) sputtering target, Tin Oxide (SnO2) sputtering target, Strontium Titanate (SrTiO3), Barium Strontium Titanate (Ba0.5Sr0.5TiO3), Lithium Orthophosphate (Li3PO4) sputtering target and Lithium battery materials targets….
Other sputtering targets: Aluminum Nitride ( AlN) sputtering target, Germanium Telluride (GeTe) sputtering target….

The following is table summarizes comparison of indium bonding and elastomer bonding:

Bonding method	Indium bonding	Elastomer bonding
Maximum operating temperature (℃)	150 ℃	250 ℃
Thermal conductivity (W/mk)	83	54
Coefficient of Thermal Expansion (K-1)	32.1 x 10-6	2.2 x 10-4
Electrical Resistivity (ohm-cm)	8 x 10-6	0.0476
Bond Coverage	>95%	>98%
Bond liner Thickness	0.010″ ± 0.003″	0.01-0.025’’

CXMETTECH offers various sputtering targets and provide indium & elastomer bonding service. We have copper, Oxygen Free Copper (OFHC), Molybdenum and Stainless steel backing plates to meet customer’s requirements.